Distribution of shallow NV centers in diamond revealed by photoluminescence spectroscopy and nanomachining

Majid Fazeli Jadidi; H. Özgür Özer; Saurav Goel; Jason I. Kilpatrick; Niall McEvoy; David McCloskey; John F. Donegan; Graham L.W. Cross

doi:10.1016/j.carbon.2020.04.086

Distribution of shallow NV centers in diamond revealed by photoluminescence spectroscopy and nanomachining

Majid Fazeli Jadidi, H. Özgür Özer, Saurav Goel, Jason I. Kilpatrick, Niall McEvoy, David McCloskey, John F. Donegan, Graham L.W. Cross^*

^*Corresponding author for this work

Department of Physics Engineering

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

We performed nanomachining combined with photoluminescence spectroscopy to understand the depth distribution of nitrogen-vacancy (NV) centers formed by low energy nitrogen ion irradiation of the diamond surface. NV⁻ and NV⁰ fluorescence signals collected from the surface progressively machined by a diamond tip in an atomic force microscope (AFM) initially rise to a maximum at 5 nm depth before returning to background levels at 10 nm. This maximum corresponds to the defect depth distribution predicted by a SRIM simulation using a 2.5 keV implantation energy per nitrogen atom. Full extinguishing of implantation produced NV⁻ and NV⁰ zero phonon line peaks occurred beyond 10 nm machining depth, coinciding with the end of easy surface material removal and onset of significant tip wear. The wear ratio of for NV active, ion irradiated diamond compared to the single-crystal diamond tip was surprisingly found to be 22:1. The reported results constitute the first integrated study of in-situ machining and wear characterization via optical properties of the diamond surface containing shallow formed NV centers. We discuss possible metrology applications for diamond tools used in precision manufacturing.

Original language	English
Pages (from-to)	114-121
Number of pages	8
Journal	Carbon
Volume	167
DOIs	https://doi.org/10.1016/j.carbon.2020.04.086
Publication status	Published - 15 Oct 2020

Bibliographical note

Publisher Copyright:
© 2020 Elsevier Ltd

Funding

HOO acknowledges support of TÜBITAK ( 2219/1059B191600977 ) and Istanbul Technical Univesity ( BAP 39973 ). SG acknowledges support from the UKRI (Grants No.: EP/K503241/1 , EP/L016567/1 , EP/S013652/1 , EP/T001100/1 , EP/S036180/1 and EP/T024607/1 ), H2020 (Cost Actions ( CA18125 , CA18224 and CA16235 ) and EURAMET EMPIR A185 (2018)), Royal Academy of Engineering Grant No. IAPP18-19∖295 (Indo- UK partnership) and Grant No. TSP1332 (South Africa- UKpartnership), and Newton Fellowship award from the Royal Society ( NIF∖R1∖191571 ). HOO acknowledges support of T?BITAK (2219/1059B191600977) and Istanbul Technical Univesity (BAP 39973). SG acknowledges support from the UKRI (Grants No.: EP/K503241/1, EP/L016567/1, EP/S013652/1, EP/T001100/1, EP/S036180/1 and EP/T024607/1), H2020 (Cost Actions (CA18125, CA18224 and CA16235) and EURAMET EMPIR A185 (2018)), Royal Academy of Engineering Grant No. IAPP18-19?295 (Indo- UK partnership) and Grant No. TSP1332 (South Africa- UKpartnership), and Newton Fellowship award from the Royal Society (NIF?R1?191571).

Funders	Funder number
Cost Actions	CA18125, CA18224, CA16235
T?BITAK
North American Interfraternal Foundation	∖R1∖191571
Horizon 2020 Framework Programme
European Association of National Metrology Institutes	EMPIR A185
UK Research and Innovation	EP/T001100/1, EP/L016567/1, EP/S013652/1, EP/T024607/1, EP/S036180/1, EP/K503241/1
Royal Academy of Engineering	IAPP18-19∖295, TSP1332
Royal Society	191571
Türkiye Bilimsel ve Teknolojik Araştirma Kurumu	2219/1059B191600977
Istanbul Teknik Üniversitesi	BAP 39973

Keywords

AFM nanomachining
Diamond cantilever
N irradiation
NV center
Photoluminescence spectroscopy

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/j.carbon.2020.04.086

Cite this

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title = "Distribution of shallow NV centers in diamond revealed by photoluminescence spectroscopy and nanomachining",

abstract = "We performed nanomachining combined with photoluminescence spectroscopy to understand the depth distribution of nitrogen-vacancy (NV) centers formed by low energy nitrogen ion irradiation of the diamond surface. NV− and NV0 fluorescence signals collected from the surface progressively machined by a diamond tip in an atomic force microscope (AFM) initially rise to a maximum at 5 nm depth before returning to background levels at 10 nm. This maximum corresponds to the defect depth distribution predicted by a SRIM simulation using a 2.5 keV implantation energy per nitrogen atom. Full extinguishing of implantation produced NV− and NV0 zero phonon line peaks occurred beyond 10 nm machining depth, coinciding with the end of easy surface material removal and onset of significant tip wear. The wear ratio of for NV active, ion irradiated diamond compared to the single-crystal diamond tip was surprisingly found to be 22:1. The reported results constitute the first integrated study of in-situ machining and wear characterization via optical properties of the diamond surface containing shallow formed NV centers. We discuss possible metrology applications for diamond tools used in precision manufacturing.",

keywords = "AFM nanomachining, Diamond cantilever, N irradiation, NV center, Photoluminescence spectroscopy",

author = "{Fazeli Jadidi}, Majid and {\"O}zer, {H. {\"O}zg{\"u}r} and Saurav Goel and Kilpatrick, {Jason I.} and Niall McEvoy and David McCloskey and Donegan, {John F.} and Cross, {Graham L.W.}",

note = "Publisher Copyright: {\textcopyright} 2020 Elsevier Ltd",

year = "2020",

month = oct,

day = "15",

doi = "10.1016/j.carbon.2020.04.086",

language = "English",

volume = "167",

pages = "114--121",

journal = "Carbon",

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publisher = "Elsevier Ltd",

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T1 - Distribution of shallow NV centers in diamond revealed by photoluminescence spectroscopy and nanomachining

AU - Fazeli Jadidi, Majid

AU - Özer, H. Özgür

AU - Goel, Saurav

AU - Kilpatrick, Jason I.

AU - McEvoy, Niall

AU - McCloskey, David

AU - Donegan, John F.

AU - Cross, Graham L.W.

PY - 2020/10/15

Y1 - 2020/10/15

N2 - We performed nanomachining combined with photoluminescence spectroscopy to understand the depth distribution of nitrogen-vacancy (NV) centers formed by low energy nitrogen ion irradiation of the diamond surface. NV− and NV0 fluorescence signals collected from the surface progressively machined by a diamond tip in an atomic force microscope (AFM) initially rise to a maximum at 5 nm depth before returning to background levels at 10 nm. This maximum corresponds to the defect depth distribution predicted by a SRIM simulation using a 2.5 keV implantation energy per nitrogen atom. Full extinguishing of implantation produced NV− and NV0 zero phonon line peaks occurred beyond 10 nm machining depth, coinciding with the end of easy surface material removal and onset of significant tip wear. The wear ratio of for NV active, ion irradiated diamond compared to the single-crystal diamond tip was surprisingly found to be 22:1. The reported results constitute the first integrated study of in-situ machining and wear characterization via optical properties of the diamond surface containing shallow formed NV centers. We discuss possible metrology applications for diamond tools used in precision manufacturing.

AB - We performed nanomachining combined with photoluminescence spectroscopy to understand the depth distribution of nitrogen-vacancy (NV) centers formed by low energy nitrogen ion irradiation of the diamond surface. NV− and NV0 fluorescence signals collected from the surface progressively machined by a diamond tip in an atomic force microscope (AFM) initially rise to a maximum at 5 nm depth before returning to background levels at 10 nm. This maximum corresponds to the defect depth distribution predicted by a SRIM simulation using a 2.5 keV implantation energy per nitrogen atom. Full extinguishing of implantation produced NV− and NV0 zero phonon line peaks occurred beyond 10 nm machining depth, coinciding with the end of easy surface material removal and onset of significant tip wear. The wear ratio of for NV active, ion irradiated diamond compared to the single-crystal diamond tip was surprisingly found to be 22:1. The reported results constitute the first integrated study of in-situ machining and wear characterization via optical properties of the diamond surface containing shallow formed NV centers. We discuss possible metrology applications for diamond tools used in precision manufacturing.

KW - AFM nanomachining

KW - Diamond cantilever

KW - N irradiation

KW - NV center

KW - Photoluminescence spectroscopy

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DO - 10.1016/j.carbon.2020.04.086

M3 - Article

AN - SCOPUS:85086596718

SN - 0008-6223

VL - 167

SP - 114

EP - 121

JO - Carbon

JF - Carbon

ER -

Distribution of shallow NV centers in diamond revealed by photoluminescence spectroscopy and nanomachining

Abstract

Bibliographical note

Funding

Keywords

UN SDGs

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