Dirichlet Process Gaussian Mixture Models for Real-Time Monitoring and Their Application to Chemical Mechanical Planarization

Jia Liu, Omer F. Beyca, Prahalad K. Rao, Zhenyu Kong*, Satish T.S. Bukkapatnam

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

25 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Dirichlet Process Gaussian Mixture Models for Real-Time Monitoring and Their Application to Chemical Mechanical Planarization'. Together they form a unique fingerprint.

Keyphrases

Computer Science

Engineering

Chemical Engineering