Characterization of nano-composite TiN-Sb coating produced with hybrid physical vapor deposition system

Keyphrases

• Depositional System 100%
• Physical Vapor Deposition 100%
• Crystallite Size 100%
• TiN Coating 100%
• Nanocomposite Characterization 100%
• Scanning Electron Microscopy 66%
• Friction Coefficient 66%
• TiN Film 66%
• X Ray Diffraction 33%
• Tribological Properties 33%
• Aluminum Oxide 33%
• X-ray Diffraction Pattern 33%
• Raman Spectroscopy 33%
• Nanosize 33%
• Low Friction Coefficient 33%
• Physical Vapor Deposition Processes 33%
• Ball-on-disc 33%
• Co-deposition 33%
• Cathodic Arc Evaporation 33%
• Nanocomposite Coating 33%
• Magnetron Sputtering 33%
• Sb Content 33%
• Antimony 33%
• Tribological Tests 33%
• Williamson-Hall Method 33%
• Field Emission Gun 33%
• Depth-sensing Indentation Technique 33%
• Crystal Formation 33%
• Disk Method 33%
• Antimony Addition 33%
• Raman Investigation 33%
• Sb Addition 33%
• Micro-Raman 33%
• Hardness Values 33%
• Maximum Hardness 33%

Engineering

• Nanocomposite 100%
• Deposition System 100%
• Physical Vapor Deposition 100%
• Coefficient of Friction 100%
• Crystallite Size 66%
• Cross Section 33%
• Ray Diffraction 33%
• Hardness Value 33%
• Magnetron 33%
• Test Result 33%
• X-Ray Diffraction Pattern 33%
• Crystal Size 33%
• Cathodic Arc 33%
• Arc Evaporation 33%
• Vapor Deposition Method 33%
• Indentation 33%
• Tribology 33%
• Composite Coating 33%
• Field Emission 33%

Material Science

• Film 100%
• Physical Vapor Deposition 100%
• Nanocomposite 100%
• X-Ray Diffraction 66%
• Scanning Electron Microscopy 66%
• Crystallite Size 66%
• Antimony 66%
• Magnetron Sputtering 33%
• Indentation 33%
• Diffraction Pattern 33%
• Raman Spectroscopy 33%
• Aluminum Oxide 33%
• Nanocomposite Coating 33%
• Tribology 33%
• Crystal Growth 33%