Characterization of ferroelectric material properties of multifunctional lead zirconate titanate for energy harvesting sensor nodes

Bozidar Marinkovic; Tolga Kaya; Hur Koser

doi:10.1063/1.3524271

Characterization of ferroelectric material properties of multifunctional lead zirconate titanate for energy harvesting sensor nodes

Bozidar Marinkovic
, Tolga Kaya
, Hur Koser^*

^*Corresponding author for this work

Yale University
Central Michigan University

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

We propose a microsystem integration technique that is ideal for low-cost fabrication of vibration energy harvesting sensor nodes. Our approach exploits diverse uses of sol-gel deposited lead zirconate titanate, effectively combining fabrication of several microsystem components into a single process and significantly reducing manufacturing cost and time. Here, we measure and characterize thin film parameters - such as the piezoelectric coefficient e ₃₁ (-4.0 C/m²), the dielectric constant ε( _r-eff (219 at 3.3 V), and the total switching polarization (2P _r;52 μC/cm²) - in order to verify this material's potential for energy harvesting, energy storage, and nonvolatile memory applications simultaneously on the same device.

Original language	English
Article number	014904
Journal	Journal of Applied Physics
Volume	109
Issue number	1
DOIs	https://doi.org/10.1063/1.3524271
Publication status	Published - 1 Jan 2011
Externally published	Yes

Funding

This work was supported by the National Science Foundation Grant No. ECCS-0601630 and the Office of Naval Research Grant No. N00014-09-01-0197. We also thank Jason Hoffman for technical help in XRD data acquisition.

Funders	Funder number
National Science Foundation	ECCS-0601630
Office of Naval Research	N00014-09-01-0197

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

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Cite this

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abstract = "We propose a microsystem integration technique that is ideal for low-cost fabrication of vibration energy harvesting sensor nodes. Our approach exploits diverse uses of sol-gel deposited lead zirconate titanate, effectively combining fabrication of several microsystem components into a single process and significantly reducing manufacturing cost and time. Here, we measure and characterize thin film parameters - such as the piezoelectric coefficient e 31 (-4.0 C/m2), the dielectric constant ε( r-eff (219 at 3.3 V), and the total switching polarization (2P r;52 μC/cm2) - in order to verify this material's potential for energy harvesting, energy storage, and nonvolatile memory applications simultaneously on the same device.",

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AB - We propose a microsystem integration technique that is ideal for low-cost fabrication of vibration energy harvesting sensor nodes. Our approach exploits diverse uses of sol-gel deposited lead zirconate titanate, effectively combining fabrication of several microsystem components into a single process and significantly reducing manufacturing cost and time. Here, we measure and characterize thin film parameters - such as the piezoelectric coefficient e 31 (-4.0 C/m2), the dielectric constant ε( r-eff (219 at 3.3 V), and the total switching polarization (2P r;52 μC/cm2) - in order to verify this material's potential for energy harvesting, energy storage, and nonvolatile memory applications simultaneously on the same device.

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Characterization of ferroelectric material properties of multifunctional lead zirconate titanate for energy harvesting sensor nodes

Abstract

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UN SDGs

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