Characterization of ferroelectric material properties of multifunctional lead zirconate titanate for energy harvesting sensor nodes

Bozidar Marinkovic, Tolga Kaya, Hur Koser*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

We propose a microsystem integration technique that is ideal for low-cost fabrication of vibration energy harvesting sensor nodes. Our approach exploits diverse uses of sol-gel deposited lead zirconate titanate, effectively combining fabrication of several microsystem components into a single process and significantly reducing manufacturing cost and time. Here, we measure and characterize thin film parameters - such as the piezoelectric coefficient e 31 (-4.0 C/m2), the dielectric constant ε( r-eff (219 at 3.3 V), and the total switching polarization (2P r;52 μC/cm2) - in order to verify this material's potential for energy harvesting, energy storage, and nonvolatile memory applications simultaneously on the same device.

Original languageEnglish
Article number014904
JournalJournal of Applied Physics
Volume109
Issue number1
DOIs
Publication statusPublished - 1 Jan 2011
Externally publishedYes

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