Characterization of ferroelectric material properties of multifunctional lead zirconate titanate for energy harvesting sensor nodes

Bozidar Marinkovic; Tolga Kaya; Hur Koser

doi:10.1063/1.3524271

Characterization of ferroelectric material properties of multifunctional lead zirconate titanate for energy harvesting sensor nodes

Bozidar Marinkovic, Tolga Kaya, Hur Koser^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

We propose a microsystem integration technique that is ideal for low-cost fabrication of vibration energy harvesting sensor nodes. Our approach exploits diverse uses of sol-gel deposited lead zirconate titanate, effectively combining fabrication of several microsystem components into a single process and significantly reducing manufacturing cost and time. Here, we measure and characterize thin film parameters - such as the piezoelectric coefficient e ₃₁ (-4.0 C/m²), the dielectric constant ε( _r-eff (219 at 3.3 V), and the total switching polarization (2P _r;52 μC/cm²) - in order to verify this material's potential for energy harvesting, energy storage, and nonvolatile memory applications simultaneously on the same device.

Original language	English
Article number	014904
Journal	Journal of Applied Physics
Volume	109
Issue number	1
DOIs	https://doi.org/10.1063/1.3524271
Publication status	Published - 1 Jan 2011
Externally published	Yes

Funding

This work was supported by the National Science Foundation Grant No. ECCS-0601630 and the Office of Naval Research Grant No. N00014-09-01-0197. We also thank Jason Hoffman for technical help in XRD data acquisition.

Funders	Funder number
National Science Foundation	ECCS-0601630
Office of Naval Research	N00014-09-01-0197

Access to Document

10.1063/1.3524271

Cite this

@article{0414bcba89af481eb61dc957ad61b698,

title = "Characterization of ferroelectric material properties of multifunctional lead zirconate titanate for energy harvesting sensor nodes",

abstract = "We propose a microsystem integration technique that is ideal for low-cost fabrication of vibration energy harvesting sensor nodes. Our approach exploits diverse uses of sol-gel deposited lead zirconate titanate, effectively combining fabrication of several microsystem components into a single process and significantly reducing manufacturing cost and time. Here, we measure and characterize thin film parameters - such as the piezoelectric coefficient e 31 (-4.0 C/m2), the dielectric constant ε( r-eff (219 at 3.3 V), and the total switching polarization (2P r;52 μC/cm2) - in order to verify this material's potential for energy harvesting, energy storage, and nonvolatile memory applications simultaneously on the same device.",

author = "Bozidar Marinkovic and Tolga Kaya and Hur Koser",

year = "2011",

month = jan,

day = "1",

doi = "10.1063/1.3524271",

language = "English",

volume = "109",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "1",

}

TY - JOUR

T1 - Characterization of ferroelectric material properties of multifunctional lead zirconate titanate for energy harvesting sensor nodes

AU - Marinkovic, Bozidar

AU - Kaya, Tolga

AU - Koser, Hur

PY - 2011/1/1

Y1 - 2011/1/1

N2 - We propose a microsystem integration technique that is ideal for low-cost fabrication of vibration energy harvesting sensor nodes. Our approach exploits diverse uses of sol-gel deposited lead zirconate titanate, effectively combining fabrication of several microsystem components into a single process and significantly reducing manufacturing cost and time. Here, we measure and characterize thin film parameters - such as the piezoelectric coefficient e 31 (-4.0 C/m2), the dielectric constant ε( r-eff (219 at 3.3 V), and the total switching polarization (2P r;52 μC/cm2) - in order to verify this material's potential for energy harvesting, energy storage, and nonvolatile memory applications simultaneously on the same device.

AB - We propose a microsystem integration technique that is ideal for low-cost fabrication of vibration energy harvesting sensor nodes. Our approach exploits diverse uses of sol-gel deposited lead zirconate titanate, effectively combining fabrication of several microsystem components into a single process and significantly reducing manufacturing cost and time. Here, we measure and characterize thin film parameters - such as the piezoelectric coefficient e 31 (-4.0 C/m2), the dielectric constant ε( r-eff (219 at 3.3 V), and the total switching polarization (2P r;52 μC/cm2) - in order to verify this material's potential for energy harvesting, energy storage, and nonvolatile memory applications simultaneously on the same device.

UR - http://www.scopus.com/inward/record.url?scp=78751471766&partnerID=8YFLogxK

U2 - 10.1063/1.3524271

DO - 10.1063/1.3524271

M3 - Article

AN - SCOPUS:78751471766

SN - 0021-8979

VL - 109

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 1

M1 - 014904

ER -

Characterization of ferroelectric material properties of multifunctional lead zirconate titanate for energy harvesting sensor nodes

Abstract

Funding

Access to Document

Other files and links

Fingerprint

Cite this