Characterization of a hybrid nanowire-MEMS force sensor using direct actuation

Bartosz Pruchnik; Krzysztof Kwoka; Tomasz Piasecki; Masoud Jedari Ghourichaei; Umut Kerimzade; Onur Aydin; Bekir Aksoy; Cemal Aydogan; Gokhan Nadar; Ivo W. Rangelow; Arda Deniz Yalcinkaya; Halil Bayraktar; Burhanettin Erdem Alaca; Teodor Gotszalk

doi:10.1088/1361-6501/adeac6

Characterization of a hybrid nanowire-MEMS force sensor using direct actuation

Bartosz Pruchnik
, Krzysztof Kwoka^*
, Tomasz Piasecki
, Masoud Jedari Ghourichaei
, Umut Kerimzade
, Onur Aydin
, Bekir Aksoy
, Cemal Aydogan
, Gokhan Nadar
, Ivo W. Rangelow
, Arda Deniz Yalcinkaya
, Halil Bayraktar
, Burhanettin Erdem Alaca
, Teodor Gotszalk

^*Corresponding author for this work

Department of Molecular Biology and Genetics

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

In this study, we describe a process of characterization of a 3-axial force sensor with piezoresistive silicon nanowires. We present a unique method for determining the gauge factor (GF) of a volumetric structure with a stiffness exceeding 10⁵N m⁻¹ and resonant frequencies above 10 MHz. We employed an uncommon Lab-in-Scanning Electron Microscope (Lab-in-SEM, LIS) approach to perform a full characterization schedule under vacuum conditions using direct actuation with nanomanipulators. We discuss the force evaluation errors arising from the sample support stiffness. Finally, we present the results of GF measurements of the multi-axially investigated device with GF of over 20 for axial and over 40 for transverse loading.

Original language	English
Article number	075024
Journal	Measurement Science and Technology
Volume	36
Issue number	7
DOIs	https://doi.org/10.1088/1361-6501/adeac6
Publication status	Published - 31 Jul 2025

Bibliographical note

Publisher Copyright:
© 2025 The Author(s). Published by IOP Publishing Ltd.

Keywords

Lab-in-SEM
LiS
MEMS
SiNW
actuation
nanowire
sensors

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10.1088/1361-6501/adeac6

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Pruchnik, B., Kwoka, K., Piasecki, T., Ghourichaei, M. J., Kerimzade, U., Aydin, O., Aksoy, B., Aydogan, C., Nadar, G., Rangelow, I. W., Yalcinkaya, A. D., Bayraktar, H., Alaca, B. E., & Gotszalk, T. (2025). Characterization of a hybrid nanowire-MEMS force sensor using direct actuation. Measurement Science and Technology, 36(7), Article 075024. https://doi.org/10.1088/1361-6501/adeac6

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title = "Characterization of a hybrid nanowire-MEMS force sensor using direct actuation",

abstract = "In this study, we describe a process of characterization of a 3-axial force sensor with piezoresistive silicon nanowires. We present a unique method for determining the gauge factor (GF) of a volumetric structure with a stiffness exceeding 105N m−1 and resonant frequencies above 10 MHz. We employed an uncommon Lab-in-Scanning Electron Microscope (Lab-in-SEM, LIS) approach to perform a full characterization schedule under vacuum conditions using direct actuation with nanomanipulators. We discuss the force evaluation errors arising from the sample support stiffness. Finally, we present the results of GF measurements of the multi-axially investigated device with GF of over 20 for axial and over 40 for transverse loading.",

keywords = "Lab-in-SEM, LiS, MEMS, SiNW, actuation, nanowire, sensors",

author = "Bartosz Pruchnik and Krzysztof Kwoka and Tomasz Piasecki and Ghourichaei, \{Masoud Jedari\} and Umut Kerimzade and Onur Aydin and Bekir Aksoy and Cemal Aydogan and Gokhan Nadar and Rangelow, \{Ivo W.\} and Yalcinkaya, \{Arda Deniz\} and Halil Bayraktar and Alaca, \{Burhanettin Erdem\} and Teodor Gotszalk",

note = "Publisher Copyright: {\textcopyright} 2025 The Author(s). Published by IOP Publishing Ltd.",

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day = "31",

doi = "10.1088/1361-6501/adeac6",

language = "English",

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T1 - Characterization of a hybrid nanowire-MEMS force sensor using direct actuation

AU - Pruchnik, Bartosz

AU - Kwoka, Krzysztof

AU - Piasecki, Tomasz

AU - Ghourichaei, Masoud Jedari

AU - Kerimzade, Umut

AU - Aydin, Onur

AU - Aksoy, Bekir

AU - Aydogan, Cemal

AU - Nadar, Gokhan

AU - Rangelow, Ivo W.

AU - Yalcinkaya, Arda Deniz

AU - Bayraktar, Halil

AU - Alaca, Burhanettin Erdem

AU - Gotszalk, Teodor

PY - 2025/7/31

Y1 - 2025/7/31

N2 - In this study, we describe a process of characterization of a 3-axial force sensor with piezoresistive silicon nanowires. We present a unique method for determining the gauge factor (GF) of a volumetric structure with a stiffness exceeding 105N m−1 and resonant frequencies above 10 MHz. We employed an uncommon Lab-in-Scanning Electron Microscope (Lab-in-SEM, LIS) approach to perform a full characterization schedule under vacuum conditions using direct actuation with nanomanipulators. We discuss the force evaluation errors arising from the sample support stiffness. Finally, we present the results of GF measurements of the multi-axially investigated device with GF of over 20 for axial and over 40 for transverse loading.

AB - In this study, we describe a process of characterization of a 3-axial force sensor with piezoresistive silicon nanowires. We present a unique method for determining the gauge factor (GF) of a volumetric structure with a stiffness exceeding 105N m−1 and resonant frequencies above 10 MHz. We employed an uncommon Lab-in-Scanning Electron Microscope (Lab-in-SEM, LIS) approach to perform a full characterization schedule under vacuum conditions using direct actuation with nanomanipulators. We discuss the force evaluation errors arising from the sample support stiffness. Finally, we present the results of GF measurements of the multi-axially investigated device with GF of over 20 for axial and over 40 for transverse loading.

KW - Lab-in-SEM

KW - LiS

KW - MEMS

KW - SiNW

KW - actuation

KW - nanowire

KW - sensors

UR - https://www.scopus.com/pages/publications/105011484065

U2 - 10.1088/1361-6501/adeac6

DO - 10.1088/1361-6501/adeac6

M3 - Article

AN - SCOPUS:105011484065

SN - 0957-0233

VL - 36

JO - Measurement Science and Technology

JF - Measurement Science and Technology

IS - 7

M1 - 075024

ER -

Characterization of a hybrid nanowire-MEMS force sensor using direct actuation

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