An analysis to improve stability of drive-mode oscillations in capacitive vibratory mems gyroscopes

S. E. Alper; K. Sahin; T. Akin

doi:10.1109/MEMSYS.2009.4805508

An analysis to improve stability of drive-mode oscillations in capacitive vibratory mems gyroscopes

S. E. Alper, K. Sahin, T. Akin

Middle East Technical University

Research output: Contribution to journal › Conference article › peer-review

9 Citations (Scopus)

Abstract

This paper presents an analysis showing that it is possible to determine the factors that limit the stability of drive-mode oscillations of a vibratory MEMS gyroscope with precise modeling. Specifically, unwanted electrical resonance characteristics of the gyroscope drive-mode are analyzed together with analytical expressions, whereas the results of the theoretical analyses are verified both by simulations and measurements, which agree very well. It is demonstrated that the stability of the drive-mode oscillations significantly improves by using a compensation capacitor across resistive preamplifiers of drive-mode oscillator output when the oscillator is driven by square-wave input signal generated by conventional automatic gain control (AGC) loops. The model can be used to identify and eliminate other factors that limit the bias stability.

Original language	English
Article number	4805508
Pages (from-to)	817-820
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs	https://doi.org/10.1109/MEMSYS.2009.4805508
Publication status	Published - 2009
Externally published	Yes
Event	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: 25 Jan 2009 → 29 Jan 2009

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10.1109/MEMSYS.2009.4805508

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@article{28babc6fc1024b48b62131c16a4867bb,

title = "An analysis to improve stability of drive-mode oscillations in capacitive vibratory mems gyroscopes",

abstract = "This paper presents an analysis showing that it is possible to determine the factors that limit the stability of drive-mode oscillations of a vibratory MEMS gyroscope with precise modeling. Specifically, unwanted electrical resonance characteristics of the gyroscope drive-mode are analyzed together with analytical expressions, whereas the results of the theoretical analyses are verified both by simulations and measurements, which agree very well. It is demonstrated that the stability of the drive-mode oscillations significantly improves by using a compensation capacitor across resistive preamplifiers of drive-mode oscillator output when the oscillator is driven by square-wave input signal generated by conventional automatic gain control (AGC) loops. The model can be used to identify and eliminate other factors that limit the bias stability.",

author = "Alper, {S. E.} and K. Sahin and T. Akin",

year = "2009",

doi = "10.1109/MEMSYS.2009.4805508",

language = "English",

pages = "817--820",

journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

issn = "1084-6999",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 ; Conference date: 25-01-2009 Through 29-01-2009",

}

TY - JOUR

T1 - An analysis to improve stability of drive-mode oscillations in capacitive vibratory mems gyroscopes

AU - Alper, S. E.

AU - Sahin, K.

AU - Akin, T.

PY - 2009

Y1 - 2009

N2 - This paper presents an analysis showing that it is possible to determine the factors that limit the stability of drive-mode oscillations of a vibratory MEMS gyroscope with precise modeling. Specifically, unwanted electrical resonance characteristics of the gyroscope drive-mode are analyzed together with analytical expressions, whereas the results of the theoretical analyses are verified both by simulations and measurements, which agree very well. It is demonstrated that the stability of the drive-mode oscillations significantly improves by using a compensation capacitor across resistive preamplifiers of drive-mode oscillator output when the oscillator is driven by square-wave input signal generated by conventional automatic gain control (AGC) loops. The model can be used to identify and eliminate other factors that limit the bias stability.

AB - This paper presents an analysis showing that it is possible to determine the factors that limit the stability of drive-mode oscillations of a vibratory MEMS gyroscope with precise modeling. Specifically, unwanted electrical resonance characteristics of the gyroscope drive-mode are analyzed together with analytical expressions, whereas the results of the theoretical analyses are verified both by simulations and measurements, which agree very well. It is demonstrated that the stability of the drive-mode oscillations significantly improves by using a compensation capacitor across resistive preamplifiers of drive-mode oscillator output when the oscillator is driven by square-wave input signal generated by conventional automatic gain control (AGC) loops. The model can be used to identify and eliminate other factors that limit the bias stability.

UR - http://www.scopus.com/inward/record.url?scp=65949110586&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2009.4805508

DO - 10.1109/MEMSYS.2009.4805508

M3 - Conference article

AN - SCOPUS:65949110586

SN - 1084-6999

SP - 817

EP - 820

JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

M1 - 4805508

T2 - 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009

Y2 - 25 January 2009 through 29 January 2009

ER -

An analysis to improve stability of drive-mode oscillations in capacitive vibratory mems gyroscopes

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