Alcohol sensing properties of sol-gel derived TiO2 thin film

Fatih Dumludag*, Sevinc Bulut, Ahmet Altindal

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this work, alcohol sensing properties of pure TiO2 thin film were investigated. TiO2 were deposited on glass substrate patterned with interdigitated transducer (IDT) by a sol-gel dipping method. Precursor solution is prepared by dissolving of titanium(IV) n-butoxide in methanol. Then glacial acetic acid was added into the solution. Final heating was performed at 773 K in air. Crystal structure of the film was investigated using X-ray diffraction. Target gases were vapors of ammonia, methanol, ethanol, and isopropyl alcohol. The measurements were performed in the temperature range of 293 K and 523 K. Gas concentrations were kept in the range of 0.4%-18%. Response characteristics of the film were determined by means of change in dc conductivity as a function of gas concentration and temperature. During the measurements 1 volt was applied to the IDT. Gas concentrations were controlled by mass flow controller. The film showed good sensitivity to the target gases in the measurement range. The results showed that responses of the film were reversible and depend on the operating temperature and gas concentration.

Original languageEnglish
Title of host publication7th International Conference of the Balkan Physical Union - Organized by the Hellenic Physical Society with Cooperation of the Physics Departments of Universities in Greece
Pages528-532
Number of pages5
DOIs
Publication statusPublished - 2010
Externally publishedYes
Event7th International Conference of the Balkan Physical Union - Alexandroupolis, Greece
Duration: 9 Sept 200913 Sept 2009

Publication series

NameAIP Conference Proceedings
Volume1203
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Conference

Conference7th International Conference of the Balkan Physical Union
Country/TerritoryGreece
CityAlexandroupolis
Period9/09/0913/09/09

Keywords

  • Sensor
  • Sol-gel
  • Thin film
  • Titanium dioxide
  • VOC

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