Abstract
This paper reports a microgyroscope design concept with the help of a 2 degrees of freedom (DoF) sense mode to achieve a wide bandwidth without sacrificing mechanical and electronic sensitivity and to obtain robust operation against variations under ambient conditions. The design concept is demonstrated with a tuning fork microgyroscope fabricated with an in-house silicon-on-glass micromachining process. When the fabricated gyroscope is operated with a relatively wide bandwidth of 1 kHz, measurements show a relatively high raw mechanical sensitivity of 131 νV (° s-1)-1. The variation in the amplified mechanical sensitivity (scale factor) of the gyroscope is measured to be less than 0.38% for large ambient pressure variations such as from 40 to 500 mTorr. The bias instability and angle random walk of the gyroscope are measured to be 131° h-1 and 1.15° h-1/2, respectively.
Original language | English |
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Article number | 074004 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 19 |
Issue number | 7 |
DOIs | |
Publication status | Published - 2009 |
Externally published | Yes |