A Prism-Based Optical Readout Method for MEMS Bimaterial Infrared Sensors

Keyphrases

• AC Coupling 50%
• Air Interface 50%
• Angle Change 50%
• Bi-material 100%
• High Dynamic Range 50%
• Inclination Angle 50%
• Infrared Radiation 50%
• Infrared Sensor 100%
• Knife-edge Method 100%
• Low Noise 50%
• Noise Dynamics 50%
• Noise Equivalent Temperature Difference 50%
• Optical Readout 100%
• Photodetector 50%
• Pixel pitch 50%
• Polarized Wave 50%
• Prism Glasses 50%
• Read Sensor 50%
• Readout Method 100%
• Reflectivity 50%
• Sensor Array 50%
• Single Sensor 50%
• Smart pixel Camera 50%
• Thermal Sensor 50%

Engineering

• Air Interface 50%
• Angle Change 50%
• Dynamic Range 50%
• Inclination Angle 50%
• Infrared Radiation 50%
• Infrared Sensor 100%
• Photodetector 50%
• Pixel Pitch 50%
• Reflectance 50%
• Sensor Array 50%
• Thermal Sensor 50%