A graph-theoretic approach for quantification of surface morphology variation and its application to chemical mechanical planarization process

Prahalad K. Rao, Omer F. Beyca, Zhenyu Kong, Satish T.S. Bukkapatnam*, Kenneth E. Case, Ranga Komanduri

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

42 Citations (Scopus)

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Keyphrases

Engineering

Material Science